Improved model predictability by machine data in computational lithography and application to laser bandwidth tuning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7274, Issue , 2009, Pages

  Hunsche, Stefan ^a   Zhao, Qian ^a   Xie, Xu ^a   Socha, Robert ^a   Liu, Hua Yu ^a   Nikolsky, Peter ^b   Ngai, Anthony ^b   Van Adrichem, Paul ^b   Crouse, Michael ^a   Lalovic, Ivan ^c  

^a ASML US Inc   (United States)

^b ASML   (Netherlands)

^c CYMER INC   (United States)

Author keywords

Computational lithography; GRAIL; Laser bandwidth; OPC; Predictive model; Scanner tuning; Verification

Indexed keywords

COMPUTATIONAL LITHOGRAPHY; GRAIL; LASER BANDWIDTH; OPC; PREDICTIVE MODEL; SCANNER TUNING;

BANDWIDTH; LASERS; LITHOGRAPHY; OSCILLATORS (ELECTRONIC); PREDICTIVE CONTROL SYSTEMS; SCANNING; SEMICONDUCTOR LASERS; TUNING;

MODEL BUILDINGS;

EID: 65849163137     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814644     Document Type: Conference Paper

References (11)

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