Defining a physically accurate laser bandwidth input for optical proximity correction (OPC) and modeling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7122, Issue , 2008, Pages

  Lalovic, Ivan ^a   Kritsun, Oleg ^a,b   McGowan, Sarah ^a,b   Bendik, Joseph ^a,c   Smith, Mark ^a,d   Farrar, Nigel ^a  

^a CYMER INC   (United States)

^b ADVANCED MICRO DEVICES   (United States)

^c Dynamic Intelligence Inc (DI)   (United States)

^d KLA Tencor Austin   (United States)

Author keywords

Aberrations; Bandwidth; Chromatic; Excimer; Focus; Gaussian; Illumination; Laser; Lithography; Modified Lorentzian; optical; Proximity; Resolution

Indexed keywords

CHROMATIC; EXCIMER; FOCUS; GAUSSIAN; ILLUMINATION; MODIFIED LORENTZIAN; OPTICAL; PROXIMITY; RESOLUTION;

ABERRATIONS; BANDWIDTH; LITHOGRAPHY; MONOCHROMATORS; TELECOMMUNICATION SYSTEMS; TRELLIS CODES;

LASERS;

EID: 62649126102     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.801556     Document Type: Conference Paper

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