Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering

Journal of Semiconductors

Volumn 30, Issue 4, 2009, Pages

  Zhang, Huafu ^a   Lei, Chengxin ^a   Liu, Hanfa ^a   Yuan, Changkun ^a  

^a SHANDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Flexible substrates; Magnetron sputtering; Transparent conduct ing films; Zirconium doped zinc oxide thin films

Indexed keywords

DEPOSITED FILMS; DOPED ZINC OXIDE THIN FILMS; ELECTRICAL AND OPTICAL PROPERTIES; FLEXIBLE SUBSTRATE; FLEXIBLE SUBSTRATES; HEXAGONAL STRUCTURES; HIGH TRANSMITTANCE; HIGH TRANSPARENCY; LOW RESISTIVITY; POLYCRYSTALLINE; PREFERRED ORIENTATIONS; RF-MAGNETRON SPUTTERING; SEM; TEREPHTHALATE; THICKNESS DEPENDENCE; TRANSPARENT CONDUCT-ING FILMS; VISIBLE SPECTRA; WAVELENGTH RANGES; ZNO;

CARRIER CONCENTRATION; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; MAGNETRON SPUTTERING; MAGNETRONS; OPTICAL PROPERTIES; POLYETHYLENE GLYCOLS; POLYETHYLENE OXIDES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC OXIDE; ZIRCONIUM;

OXIDE FILMS;

EID: 65649099424     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/30/4/043004     Document Type: Article

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