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Volumn 516, Issue 19, 2008, Pages 6560-6564
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Low temperature synthesis of ITO thin film on polymer in Ar/H2 plasma by pulsed DC magnetron sputtering
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Author keywords
Hydrogen; Indium tin oxide; ITO; Polymer; Pulsed magnetron sputtering
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Indexed keywords
AMORPHOUS MATERIALS;
ARGON;
ATOMIC SPECTROSCOPY;
COATINGS;
DISCHARGE (FLUID MECHANICS);
EMISSION SPECTROSCOPY;
FLUID MECHANICS;
GASES;
HYDROGEN;
INDIUM;
IONIZATION OF GASES;
LEAKAGE (FLUID);
LITHOGRAPHY;
LOW TEMPERATURE EFFECTS;
MICROSTRUCTURE;
MOLECULAR SPECTROSCOPY;
MORPHOLOGY;
NANOSTRUCTURED MATERIALS;
NONMETALS;
OPTICAL EMISSION SPECTROSCOPY;
OXIDE FILMS;
OXYGEN;
PHOTORESISTS;
POLYMER FILMS;
POLYMERS;
SOLIDS;
SPECTRUM ANALYSIS;
THICK FILMS;
THIN FILM DEVICES;
THIN FILMS;
TIN;
TINNING;
TITANIUM COMPOUNDS;
X RAY DIFFRACTION ANALYSIS;
AMORPHOUS MATRICES;
HYDROGEN GASES;
INDIUM TIN OXIDE (ITO) FILMS;
ITO THIN FILMS;
LOW TEMPERATURE (LTR);
LOW-TEMPERATURE SYNTHESIS;
MICROSTRUCTURE EVOLUTIONS;
MIXTURE GAS;
OPTICAL EMISSION SPECTROSCOPY (OES);
OXYGEN GASES;
POLYETHERSULFONE (PES);
PULSED DC MAGNETRON SPUTTERING;
TIN DOPED INDIUM OXIDE (ITO) FILM;
MAGNETRON SPUTTERING;
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EID: 45549093997
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2007.11.028 Document Type: Article |
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Times cited : (23)
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References (11)
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