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Applied Physics Letters

Volumn 94, Issue 17, 2009, Pages

High sensitivity interdigited capacitive sensors using branched treelike carbon nanotubes on silicon membranes

(4) Abdi, Y a Ebrahimi, A a Mohajerzadeh, S a Fathipour, M a

a UNIVERSITY OF TEHRAN (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

BRANCHED STRUCTURES; CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSORS; DIRECT CURRENTS; EXTERNAL PRESSURES; HIGH SENSITIVITIES; INTERDIGITAL; INTERDIGITAL STRUCTURES; MECHANICAL VARIATIONS; MICROMACHINING TECHNIQUES; OSCILLATORY BEHAVIORS; SEQUENTIAL GROWTHS; SILICON MEMBRANES; SILICON SUBSTRATES;

PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SENSORS;

CARBON NANOTUBES;

EID: 65449152255 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3127533 Document Type: Article

Times cited : (23)

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