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Volumn 392, Issue 1, 2001, Pages 16-21

Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition

(3) Lung, B H a Chiang, M J a Hon, M H a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Chemical vapor deposition; Diamond like carbon; Electron cyclotron resonance

Indexed keywords

COMPOSITION EFFECTS; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SYNTHESIS (CHEMICAL); VICKERS HARDNESS TESTING;

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 0035939514 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01010-0 Document Type: Article

Times cited : (20)

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