Effect of barrier layers on the properties of indium tin oxide thin films on soda lime glass substrates

Thin Solid Films

Volumn 517, Issue 14, 2009, Pages 4074-4077

  Lee, Jung Min ^a,b   Choi, Byung Hyun ^a   Ji, Mi Jung ^a   An, Yong Tae ^a   Park, Jung Ho ^a,b   Kwon, Jae Hong ^b   Ju, Byeong Kwon ^b  

^a Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Barrier layer; Diffusion; Indium tin oxide (ITO); RF magnetron sputtering; Soda lime glass (SLG)

Indexed keywords

BARRIER LAYER; CERAMIC TARGETS; ELECTRICAL RESISTIVITIES; HIGH STRAINS; INDIUM TIN OXIDE (ITO); INDIUM TIN OXIDE FILMS; INDIUM TIN OXIDE THIN FILMS; ITO FILMS; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; SODA LIME GLASS (SLG); SODA LIME GLASS SUBSTRATES; STRUCTURAL AND OPTICAL PROPERTIES; STRUCTURAL DEFECTS;

ALUMINUM; DIFFUSION; ELECTRIC RESISTANCE; GLASS; INDIUM; LIME; MAGNETRONS; OPTICAL PROPERTIES; PHOTOLITHOGRAPHY; SECONDARY ION MASS SPECTROMETRY; SILICON COMPOUNDS; SODIUM COMPOUNDS; SUBSTRATES; TIN; TITANIUM COMPOUNDS;

OXIDE FILMS;

EID: 65449137843     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.149     Document Type: Article

References (19)

1. Shigesato Y., Takaki S., and Haranoh T. J. Appl. Phys. 71 (1992) 3356
2. Hanisch J., Ahlswede E., and Powalla M. Thin Solid Films 516 (2008) 7241
3. Park S.K., Han J.I., Keun W., and Kwak M.G. Thin Solid Films 397 (2001) 49
4. Tang C.W., and Van Slyke S.A. Appl. Phys. Lett. 51 (1987) 913
5. Bruce G. Aitken, Matthew J. Dejneka, Adam J.G. Ellison, Thomas E. Paulson, U.S. Patent No. 7323426, 30 Dec. 2004.
6. Yaglioglu B., Huang Y.-J., Yeom H.-Y., and Paine D.C. Thin Solid Films 496 (2006) 89
7. Hong J.S., Rhee B.R., Kim H.M., Je K.C., Kang Y.J., and Ahn J.S. Thin Solid Films 467 (2004) 158
8. Tsai R.-Y., Ho F.-C., and Hua M.-Y. Opt. Eng. 36 (1997) 2335
9. Aubry E., Ghazzal M.N., Demange V., Chaoui N., Robert D., and Billard A. Surf. Coat. Technol. 201 (2007) 7706
10. Biswas P.K., De A., Pramanik N.C., Chakraborty P.K., Ortner K., Hock V., and Korder S. Mater. Lett. 57 (2003) 2326
11. Raoufi D., Kiasatpour A., Fallah H.R., Sayid A., and Rozatian H. Appl. Surf. Sci. 253 (2007) 9085
12. Salehi A. Thin Solid Films 324 (1998) 214
13. Hamberg I., and Grangvist C.G. J Appl Phys 60 (1896) 123
14. Kim J.W., Kang H.S., and Lee S.Y. J. Electrical Eng. Tech. 1 (2006) 98
15. Garkova R., Volksch G., and Russel C. J. Non-Cryst. Solids 351 (2005) 2287
16. Lim T.Y., Kim C.Y., Shim K.B., and Auh K.H. J. Kor. Crys. Grow. Crys. Technol. 13 (2003) 254
17. Kulkarni A.K., Schulz K.H., Lim T.S., and Khan M. Thin Solid Films 345 (1999) 273
18. Fehlner F.P. J. Non-Cryst. Solids 195 (1996) 89
19. Guanghui F.U., Jiafeng D.U., Donghui P.A.N., and Ouli H.E. J. Non-Cryst. Solids 112 (1989) 454