Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7204, Issue , 2009, Pages

  Berman, Gennady P ^a   Chernobrod, Boris M ^a   Bishop, Alan R ^b   Gorshkova, Vyacheslav N ^c  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c INSTITUTE OF PHYSICS   (Ukraine)

Author keywords

Cantilever; Micromirror; Radiation pressure; Terahertz

Indexed keywords

CANTILEVER; HIGH QUALITIES; MICROMECHANICAL MIRRORS; MICROMIRROR; MID-INFRARED; OPTICAL MICROCAVITIES; RADIATION PRESSURE; ROOM TEMPERATURES; TERAHERTZ; TERAHERTZ DETECTORS; UNCOOLED DETECTORS; UNCOOLED INFRARED;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NANOCANTILEVERS; PRESSURE; PRESSURE SENSORS; PRESSURE TRANSDUCERS;

RADIATION DETECTORS;

EID: 65349183043     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.812541     Document Type: Conference Paper

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