Wire-grid polarizer for the UV spectral region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7205, Issue , 2009, Pages

  Weber, Thomas ^a   Fuchs, Hans Jörg ^a   Schmidt, Holger ^a   Kley, Ernst Bernhard ^a   Tünnermann, Andreas ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

E beam lithography; Metallic nanostructures; Subwavelength grating; UV spectral region; Wire grid polarizer

Indexed keywords

E-BEAM LITHOGRAPHY; METALLIC NANOSTRUCTURES; SUBWAVELENGTH GRATING; UV SPECTRAL REGION; WIRE GRID POLARIZER;

ALUMINA; ALUMINUM; ELECTRON BEAM LITHOGRAPHY; FABRICATION; NANOSTRUCTURES; OPTICAL BEAM SPLITTERS; OPTICAL INSTRUMENTS; OPTICAL VARIABLES CONTROL;

WIRE;

EID: 65349175213     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.807993     Document Type: Conference Paper

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