Ion beam synthesis of SiC by C implantation into SIMOX(1 1 1)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 8-9, 2009, Pages 1281-1284

  dos Reis, R M S ^a   Maltez, R L ^a   Boudinov, H ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

C implantation into SIMOX; Ion beam synthesis; RBS C; SiC on Si; TEM

Indexed keywords

C IMPLANTATION INTO SIMOX; ION BEAM SYNTHESIS; RBS/C; SIC ON SI; TEM;

ION BEAMS; IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

SILICON CARBIDE;

EID: 65249177304     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.01.164     Document Type: Article

References (18)

1. Morkoç H., Strite S., Gao G.B., Lin M.E., Sverdlov B., and Burns M. J. Appl. Phys. 76 (1994) 1363
2. Matsushita Y., Nakata T., Uetani T., Yamaguchi T., and Niina T. Jpn. J. Appl. Phys. 29 (1990) L343
3. Ikeda M., Hayakawa T., Yamagiwa S., Matsunami H., and Tanaka T. J. Appl. Phys. 50 (1979) 8215
4. Edmond J.A., Kong H.S., and Carter Jr. C.H. Physica B 185 (1993) 453
5. Komiyama J., Abe Y., Suzuki S., and Nakanishi H. J. Appl. Phys. 100 (2006) 033519
6. Yamamoto A., Yamauchio T., Tanikawa T., Sasase M., Ghosh B.K., Hashimoto A., and Ito Y. J. Cryst. Growth 261 (2004) 266
7. Nakamura S., Senoh M., Nagahama S., Iwasa N., Matsushita T., and Mukai T. Appl. Phys. Lett. 76 (2000) 22
8. Nakamura S., Senoh M., Nagahama S., Iwasa N., Yamada T., Matsushita T., Kiyoku H., Sugimoto Y., Kozaki T., Umemoto H., Sano M., and Chocho K. Appl. Phys. Lett. 72 (1998) 2014
9. Usui A., Sunakawa H., Sakai A., and Yamaguchi A.A. Jpn. J. Appl. Phys. 36 Part 2 (1997) L899
10. Maltez R.L., de Oliveira R.M., dos Reis R.M.S., and Boudinov H. J. Appl. Phys. 100 (2006) 063504
11. Izumi K., Doken M., and Ariyoshi H. Electron. Lett. 14 18 (1978) 593
12. Watanabe M., and Tooi A. Jpn. J. Appl. Phys. 5 (1966) 737
13. Götz B., Lindner J.K.N., and Stritzker B. Nucl. Instr. and Meth. B 127-128 (1997) 333
14. Nejim A., Hemment P.L., and Stoemenos J. Nucl. Instr. and Meth. B 120 (1996) 129
15. R. Koegler, H. Reuter, M. Voelskow, W. Skorupa, A. Romano-rodriguez, A. Perez-Rodriguez, C. Serre, L. Calvio-Barrio, J.R. Morante, in: Proceedings of 11th International Conference on Ion Implantation Technology, 1996, p. 709.
16. Lindner J.K.N. Appl. Phys. A 77 (2003) 27
17. Ziegler J.F., P Biersack J., and Littmark U. The Stopping and Range of Ions in Solids Vol. 1 (1985), Pergamon Press, Oxford
18. Doolitle L.R. Nucl. Instr. and Meth. B 9 (1985) 344