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Volumn 394, Issue 1, 2009, Pages 373-382
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Spectroscopic evaluation of a compact magnetically boosted radiofrequency glow discharge for time-of-flight mass spectrometry
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HORIBA LTD
(Japan)
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Author keywords
Depth profiling; Magnetic field; Radiofrequency glow discharge time of flight mass spectrometry
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Indexed keywords
ANALYTE;
COATED SAMPLES;
DEPTH-RESOLVED ANALYSIS;
DIFFERENT PROCESS;
ION SIGNALS;
ION TRANSPORTS;
IONISATION;
ND-FE-B MAGNETS;
OPERATING CONDITIONS;
RADIOFREQUENCY GLOW DISCHARGE TIME-OF-FLIGHT MASS SPECTROMETRY;
SIMPLE MODIFICATIONS;
SPECTROSCOPIC EVALUATIONS;
SPUTTERING RATES;
TIME-OF FLIGHT MASS SPECTROMETRIES;
DEPTH PROFILING;
GLOW DISCHARGES;
HIGH PERFORMANCE LIQUID CHROMATOGRAPHY;
IONIZATION;
MAGNETIC FIELDS;
MAGNETIC MATERIALS;
MAGNETS;
MASS SPECTROMETRY;
NEGATIVE IONS;
NEODYMIUM ALLOYS;
SPECTRUM ANALYSIS;
THICKNESS MEASUREMENT;
MASS SPECTROMETERS;
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EID: 65249119253
PISSN: 16182642
EISSN: 16182650
Source Type: Journal
DOI: 10.1007/s00216-009-2688-x Document Type: Article |
Times cited : (9)
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References (32)
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