An approach to calculate sputtering rates in glow discharges by using a new crater volume evaluation method

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 62, Issue 11, 2007, Pages 1263-1268

  Martín, Antonio ^a   Martínez, Agurtzane ^b   Pereiro, Rosario ^a   Bordel, Nerea ^a   Sanz Medel, Alfredo ^a  

^a UNIVERSITY OF OVIEDO   (Spain)

^b AIN   (Spain)

Author keywords

Crater shape; Glow discharge; Numerical calculation; Sputtering rate

Indexed keywords

MATHEMATICAL MODELS; PROFILOMETRY; SPUTTERING; STAINLESS STEEL;

CRATER SHAPE; MATHEMATICAL APPROXIMATION; SPUTTERING RATE;

GLOW DISCHARGES;

EID: 36248990254     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2007.10.012     Document Type: Article

References (11)

1. In: Marcus R.K., and Broekaert J.A.C. (Eds). Glow Discharge Plasmas in Analytical Spectroscopy (2003), John Wiley and Sons Ltd, Chichester, England
2. Fernandez B., Martin A., Bordel N., Pereiro R., and Sanz-Medel A. In-depth profile analysis of thin films deposited on non-conducting glasses by radiofrequency glow-discharge-optical emission spectrometry. Anal. Bioanal. Chem. 384 (2006) 876-886
3. Weiss Z. Emission yields and the standard model in glow discharge optical emission spectroscopy: links to the underlying physics and analytical interpretation of the experimental data. Spectrochim. Acta Part B 61 (2006) 121-133
4. Bengtson A., and Nelis T. The concept of constant emission yield in GDOES. Anal. Bioanal. Chem. 385 (2006) 568-585
5. Beck U., Fritz T., Gamer N., and Wirth T. VAMAS TWA 2. Project: Multilayer Reference Coatings for GD OES (2001)
6. Parker M., Hartenstein M.L., and Marcus R.K. Influence of discharge parameters on the resultant crater shapes for a radio frequency glow discharge atomic emission source. Anal. Chem. 68 (1996) 4213-4220
7. Marshall K.A., Casper T.J., Brushwyler K.R., and Mitchell K.C. The analytical impact of power control in a radio frequency glow discharge optical emission spectrometry. J. Anal. At. Spectrom. 18 (2003) 637-645
8. Bogaerts A., and Gijbels R. Calculation of crater profiles on a flat cathode in a direct current glow discharge, and comparison with experiment. Spectrochim. Acta Part B 52 (1997) 765-778
9. Bogaerts A., Verscharen W., and Steers E. Computer simulations of crater profiles in glow discharge optical emission spectrometry: comparison with experiments and investigation of the underlying mechanisms. Spectrochim. Acta Part B 59 (2004) 1403-1411
10. Martin A., Bordel N., Pereiro R., and Sanz-Medel A. CraterVol. Applications 278 (June 7 2007) (Registro de la propiedad intelectual del Principado de Asturias (Spain))
11. Pérez C., Pereiro R., Bordel N., and Sanz-Medel A. Comparative study of the exciation/ionization capacity of direct current versus radiofrequency glow discharge optical emission spectrometry. J. Anal. At. Spectrom. 14 (1999) 1413-1418