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Volumn 517, Issue 14, 2009, Pages 3950-3953
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Realization of high mobility p-type co-doped ZnO: AlN film with a high density of nitrogen-radicals
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Author keywords
Aluminium nitride codoped; Homojunction; p type; ZnO
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Indexed keywords
ACTIVATED NITROGENS;
ALN;
ALN FILMS;
ALN THIN FILMS;
ALUMINIUM-NITRIDE CODOPED;
CO-DOPED ZNO;
CO-SPUTTERING;
ELECTRICAL PROPERTIES;
HIGH DENSITIES;
HIGH MOBILITIES;
HOMOJUNCTION;
P-TYPE;
P-TYPE BEHAVIORS;
P-TYPE ZNO;
P-TYPE ZNO FILMS;
RF-POWER;
ZNO;
ALUMINUM;
ELECTRIC PROPERTIES;
HOLE CONCENTRATION;
HOLE MOBILITY;
METALLIC FILMS;
NITRIDES;
OXIDE MINERALS;
PLASMAS;
QUARTZ;
SODIUM COMPOUNDS;
ZINC OXIDE;
SEMICONDUCTING ZINC COMPOUNDS;
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EID: 65149103311
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2009.01.171 Document Type: Article |
Times cited : (7)
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References (12)
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