MEMS accelerometer fabricated using printed circuit processing techniques

IEEE International Symposium on Industrial Electronics

Volumn , Issue , 2007, Pages 3250-3254

  Rogers, John E ^a   Ramadoss, Ramesh ^a   Ozmun, Phillip M ^a   Dean, Robert N ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; BIOLOGICAL MATERIALS; COMPOSITE MICROMECHANICS; ELECTRODES; ELECTROLYSIS; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS INDUSTRY; GALLIUM ALLOYS; INDUSTRIAL ELECTRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; NATURAL FREQUENCIES; OPTICAL DESIGN; PHOTORESISTS; POLYMERS; PRINTED CIRCUITS; TECHNICAL PRESENTATIONS;

AIR GAP HEIGHT; BOTTOM ELECTRODES; CAPACITIVE SENSING; CAPACITIVE-TYPE; EXTERNAL-; INERTIAL FORCES; INITIAL GAP; INTERNATIONAL SYMPOSIUM; KAPTON FILMS; KAPTON POLYIMIDE; MEMBRANE AREA; MEMS ACCELEROMETERS; METALLIZATION; PCB MEMS; POLYMIDE; PRINTED CIRCUIT PROCESSING TECHNIQUES; PROOF MASS; Q FACTORS; RESONANT FREQUENCIES; STRUCTURAL LAYERS; SUSPENSION BEAMS; TEFLON SUBSTRATE; TOP SURFACE;

METALLIZING;

EID: 50049102690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISIE.2007.4375135     Document Type: Conference Paper

References (7)

1. R. Ramadoss, S. Lee, Y Lee, V. Bright, and K. Gupta, "Rf mems capacitive switches fabricated using printed circuit processing techniques," IEEE/ASME Journal of Microelectromechanical Systems, vol. 15, pp. 1595-1604, December 2006.
2. X. Wang, J. Engel, and C. Liu, "Liquid crystal polymer (Icp) for mems: processes and applications," J. Micromech. Microeng., vol. 13, pp. 628-633, 2003.
3. J. N. Palasagaram and R. Ramadoss, "Mems capacitive pressure sensor fabricated using printed circuit processing techniques," IEEE Sensors Journal, vol. 6, pp. 1374-1375, December 2006.
4. D. Fries, G. Steimle, S. Natarajan, S. Ivanov, H. Broadbent, and T. Weller, "Maskless lithography pcb/laminate mems for a salinity sensing system," Proc. Int. Microelectron. Packag. Soc. (IMAPS) Workshop on Packag. MEMS and Related Micro IntegrxNano Syst., 2002.
5. R. Jackson and R. Ramadoss, "A mems-based electrostatically tunable circular microstrip patch antenna," Journal of Micromechanics and Microengineering, vol. 17, pp. 1-8, January 2007.
6. M.-H. Bao, Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes, vol. 8 of Handbook of Sensors and Actuators. Elsevier, first ed., 2000.
7. J. Soderkvist, "Similarities between piezoelectric thermal and other internal means of exciting vibrations," Journal of Micromechanics and Microengineering, vol. 3, pp. 24-31, 1983.