메뉴 건너뛰기




Volumn , Issue , 2007, Pages 141-144

PCB-MEMS RF switch: Parametric analysis and design guide lines

Author keywords

Coplanar waveguides; Fabrication process; Microelectromechanical system; Printed circuit board

Indexed keywords

BRIDGES; COMMUNICATION SYSTEMS; COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; COPPER; ELECTRIC SWITCHES; ELECTROMAGNETIC WAVE EMISSION; ELECTROMAGNETIC WAVES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; MONOLITHIC INTEGRATED CIRCUITS; PARAMETER ESTIMATION; PHOTONICS; PRINTED CIRCUIT MANUFACTURE; PRINTED CIRCUITS; SUBSTRATES; SWITCHES;

EID: 50449101246     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMOC.2007.4404231     Document Type: Conference Paper
Times cited : (2)

References (13)
  • 3
    • 50449096227 scopus 로고    scopus 로고
    • Microsystem Design, EE 321, MEMS Design - Stanford University
    • Chapter 3, Ed. Senturia, Kluwer
    • O. Solgaard, Microsystem Design, EE 321, MEMS Design - Stanford University". Chapter 3 - Electrostatic Actuation". Ed. Senturia, Kluwer, 2001.
    • (2001) Electrostatic Actuation
    • Solgaard, O.1
  • 4
    • 0026992268 scopus 로고
    • A Finite Element Method for Determining Structural Displacements Resulting from Electrostatic Forces
    • Hilton Head, SC
    • B.E. Artz and L.W. Cathey, "A Finite Element Method for Determining Structural Displacements Resulting from Electrostatic Forces", Proc. IEEE Solid State Sensor and Actuator Workshop, Hilton Head, SC, 1992, pp 190-193.
    • (1992) Proc. IEEE Solid State Sensor and Actuator Workshop , pp. 190-193
    • Artz, B.E.1    Cathey, L.W.2
  • 6
    • 33847230954 scopus 로고    scopus 로고
    • L. C. Kretly, A. Tavora A. S., C. E. Capovilla, MEMS switch for wireless Communication circuits: Process and Simulation, Microwave and optoelectronics, SBMO/IEEE MTT-S International Conference, ISBN: 0-7803-9341-4, pp. 427-429, July 2005.
    • L. C. Kretly, A. Tavora A. S., C. E. Capovilla, "MEMS switch for wireless Communication circuits: Process and Simulation", Microwave and optoelectronics, SBMO/IEEE MTT-S International Conference, ISBN: 0-7803-9341-4, pp. 427-429, July 2005.
  • 7
    • 50449098765 scopus 로고    scopus 로고
    • McGRAW - HILL BOOK COMPANY, Printed Circuits Handbook, Clyde F. Coombs, Jr., United States of America, 1967.
    • McGRAW - HILL BOOK COMPANY, "Printed Circuits Handbook", Clyde F. Coombs, Jr., United States of America, 1967.
  • 8
    • 0038104353 scopus 로고    scopus 로고
    • Low cost RF MEMS switches fabricated on microwaves laminated printed circuit boards
    • April
    • Hung-Pin Chang, Jiangyuan Qian, Bedri A. Cetiner, F. De Flaviis, Mark Bachman, and G. P. Li, "Low cost RF MEMS switches fabricated on microwaves laminated printed circuit boards", IEEE Electron device letters, Vol. 24, no. 4, pp. 227-229, April 2003.
    • (2003) IEEE Electron device letters , vol.24 , Issue.4 , pp. 227-229
    • Chang, H.-P.1    Qian, J.2    Cetiner, B.A.3    De Flaviis, F.4    Bachman, M.5    Li, G.P.6
  • 10
    • 0035280569 scopus 로고    scopus 로고
    • Monolithically integrated micromachined RF MEMS Capacitive Switches
    • J.Y. Park, G.H. Kim, K.W. Chung, and J.U. Bu, "Monolithically integrated micromachined RF MEMS Capacitive Switches," Sensors and Acuators A, vol. A89, no.1-2, pp. 88-94, 2001.
    • (2001) Sensors and Acuators A , vol.A89 , Issue.1-2 , pp. 88-94
    • Park, J.Y.1    Kim, G.H.2    Chung, K.W.3    Bu, J.U.4
  • 12
    • 0026992268 scopus 로고
    • A Finite Element Method for Determining Structural Forces
    • Hilton Head, SC
    • B. E. Artz and L. W. Cathey, "A Finite Element Method for Determining Structural Forces", Proc. IEEE solid State Sensor Actuator Workshop, Hilton Head, SC, 1992, pp. 190-193.
    • (1992) Proc. IEEE solid State Sensor Actuator Workshop , pp. 190-193
    • Artz, B.E.1    Cathey, L.W.2
  • 13
    • 50449083516 scopus 로고    scopus 로고
    • Behavioral Modeling of Viscous Damping in MEMS
    • Thesis Report, Department of Electrical and Computer Engineering Carnegie Mellon University, Pittsburgh
    • Satish Kumar Vemuri, "Behavioral Modeling of Viscous Damping in MEMS" Thesis Report, Department of Electrical and Computer Engineering Carnegie Mellon University, Pittsburgh, 2000.
    • (2000)
    • Kumar Vemuri, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.