Theory of nanocluster size distributions from ion beam synthesis

Physical Review Letters

Volumn 102, Issue 14, 2009, Pages

  Yuan, C W ^a,b   Yi, D O ^a,b   Sharp, I D ^c   Shin, S J ^a,b   Liao, C Y ^a,b   Guzman, J ^a,b   Ager, J W ^b   Haller, E E ^a,b   Chrzan, D C ^a,b  

^a Lawrence Berkeley National Laboratory   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c WALTER SCHOTTKY INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERISTIC LENGTHS; CLUSTER SIZES; CLUSTER-SIZE DISTRIBUTIONS; COUPLED RATE EQUATIONS; EFFECTIVE DIFFUSION COEFFICIENTS; IMPLANTED SPECIES; ION BEAM SYNTHESIS; ION FLUXES; ION SOLUBILITIES; KINETIC MONTE CARLO SIMULATIONS; MATRIX INTERFACES; SELF CONSISTENT MEAN FIELDS; STEADY-STATE REGIMES;

ION BEAMS; MEAN FIELD THEORY; MONTE CARLO METHODS; MOSFET DEVICES; NANOCLUSTERS; SIZE DISTRIBUTION;

IONS;

EID: 64649088077     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.102.146101     Document Type: Article

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