Parametrization of atomic force microscopy tip shape models for quantitative nanomechanical measurements

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 984-992

  Belikov, Sergey ^a   Erina, Natalia ^b   Huang, Lin ^b   Su, Chanmin ^b   Prater, Craig ^c   Magonov, Sergei ^d   Ginzburg, Valeriy ^e   McIntyre, Bob ^e   Lakrout, Hamed ^e   Meyers, Gregory ^e  

^a Marena Systems Corporation   (United States)

^b VEECO INSTRUMENTS INC   (United States)

^c Anasys Instruments   (United States)

^d AGILENT TECHNOLOGIES   (United States)

^e DOW CHEMICAL COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCES; ATOMIC-FORCE MICROSCOPIES; AXI-SYMMETRIC; BULK MEASUREMENTS; CONTACT MECHANICS; LOW-K DIELECTRICS; MECHANICAL MEASUREMENTS; MICROTENSILE; MODEL PARAMETERIZATION; NANO-METER SCALE; NANOMECHANICAL MEASUREMENTS; PARAMETRIZATION; RECONSTRUCTION IMAGES; SPIN-ON; TIP SHAPES; TRANSMISSION ELECTRONS;

MEASUREMENTS; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; UNCERTAINTY ANALYSIS;

ATOMIC FORCE MICROSCOPY;

EID: 64549163332     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3071852     Document Type: Article

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