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Volumn 9, Issue 2, 2009, Pages 736-740

Quantitative measurement of cantilever spring constant using heterodyne interferometer

Author keywords

Atomic force microscope; Heterodyne interferometer; Microfabricated cantilevers; Power spectral density; Spring constant; Thermal tune

Indexed keywords

ATOMIC FORCE MICROSCOPE; HETERODYNE INTERFEROMETER; MICROFABRICATED CANTILEVERS; SPRING CONSTANT; THERMAL TUNE;

EID: 64549089652     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.C014     Document Type: Conference Paper
Times cited : (7)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.