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Volumn 9, Issue 2, 2009, Pages 736-740
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Quantitative measurement of cantilever spring constant using heterodyne interferometer
a
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Author keywords
Atomic force microscope; Heterodyne interferometer; Microfabricated cantilevers; Power spectral density; Spring constant; Thermal tune
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Indexed keywords
ATOMIC FORCE MICROSCOPE;
HETERODYNE INTERFEROMETER;
MICROFABRICATED CANTILEVERS;
SPRING CONSTANT;
THERMAL TUNE;
ATOMS;
HETERODYNING;
INTERFEROMETERS;
LASER INTERFEROMETRY;
MICROFABRICATION;
POWER SPECTRAL DENSITY;
TUNING;
NANOCANTILEVERS;
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EID: 64549089652
PISSN: 15334880
EISSN: None
Source Type: Journal
DOI: 10.1166/jnn.2009.C014 Document Type: Conference Paper |
Times cited : (7)
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References (12)
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