Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2297-2303

  Dahlen, G ^a   Osborn, M ^a   Okulan, N ^a   Foreman, W ^a   Chand, A ^a   Foucher, J ^b  

^a VEECO INSTRUMENTS INC   (United States)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX STRUCTURES; CRITICAL DIMENSION; LEGENDRE TRANSFORMS;

ALGORITHMS; ATOMIC FORCE MICROSCOPY; COSINE TRANSFORMS; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; TOPOLOGY;

IMAGE RECONSTRUCTION;

EID: 29044438927     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2101601     Document Type: Article

References (12)

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