Controlled electroplating for high-aspect-ratio zone-plate fabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2592-2596

  Holmberg, A ^a   Lindblom, M ^a   Hertz, H M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; DIFFRACTIVE OPTICS; ELECTRIC CURRENT MEASUREMENT; ELECTROPLATING; LIGHT TRANSMISSION; NICKEL PLATING; REAL TIME SYSTEMS;

LIGHT TRANSMISSION MEASUREMENTS; NICKEL ASPECT RATIO; POLYMER MOLDS; SOFT X-RAY ZONE;

NANOSTRUCTURED MATERIALS;

EID: 33845257285     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2362761     Document Type: Article

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