Structural film characteristics related to the passivation properties of high-rate (> 0.5 nm/s) plasma deposited a-SiNx:H

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1158-1161

  Hong, J ^a   Kessels, W M M ^a   Soppe, W J ^b   Rieffe, H C ^b   Weeber, A W ^b   Van De Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TNO   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC RECOIL DETECTION (ERD); HYDROGEN DIFFUSION; OPTICAL TRANSPARENCY; PLASMA DEPOSITION;

DIFFUSION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; HYDROGEN BONDS; OPTICAL FILMS; REFRACTIVE INDEX; SOLAR CELLS;

SILICON NITRIDE;

EID: 6444219520     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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