Model-based FTIR reflectometry measurement system for deep trench structures of DRAM

Guang Pu Xue Yu Guang Pu Fen Xi/Spectroscopy and Spectral Analysis

Volumn 29, Issue 4, 2009, Pages 935-939

  Liu, Shi Yuan ^a   Zhang, Chuan Wei ^b   Shen, Hong Wei ^b   Gu, Hua Yong ^b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Deep trench structure; DRAM; FTIR spectrometer; Infrared reflectance spectrum

Indexed keywords

DEEP TRENCH STRUCTURE; DRAM; DYNAMIC RANDOM ACCESS MEMORIES; FOURIER TRANSFORM INFRARED; FTIR; FTIR SPECTROMETER; GEOMETRIC PARAMETERS; HIGH RESOLUTION TOOLS; INCIDENCE ANGLES; INFRARED REFLECTANCE SPECTRUM; MEASUREMENT SYSTEMS; MICRO-ELECTRO MECHANICAL SYSTEMS; MODEL-BASED; NANO-METER SCALE; NON CONTACTS; NON-DESTRUCTIVE; ON-LINE MONITORING; OPTICAL PATH DESIGNS; POTENTIAL APPLICATIONS; REFLECTOMETRY; REFLECTOMETRY MEASUREMENTS; SIGNAL-TO-NOISE RATIOS; SLIT APERTURES;

ACOUSTIC INTENSITY; DYNAMIC RANDOM ACCESS STORAGE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; REFLECTION; REFLECTOMETERS; SIGNAL TO NOISE RATIO; SPECTROMETERS; SPECTROMETRY;

MODEL STRUCTURES;

EID: 64049108949     PISSN: 10000593     EISSN: None     Source Type: Journal    
DOI: 10.3964/j.issn.1000-0593(2009)04-0935-05     Document Type: Article

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