TOF-SIMS depth profiling and element mapping on oxidized AlCrVN hard coatings

Analytical and Bioanalytical Chemistry

Volumn 393, Issue 8, 2009, Pages 1857-1861

  Schnoller J ^a   Franz, R ^b   Mitterer, C ^b   Hutter, H ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

Author keywords

AlCrVN; Depth profiling; Element mapping; Hard coatings; TOF SIMS; Vanadium oxides

Indexed keywords

ALUMINA; ALUMINUM; CESIUM; CESIUM COMPOUNDS; CHROMIUM; CLUSTER ANALYSIS; DEPTH PROFILING; ELECTRODEPOSITION; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; MASS SPECTROMETERS; OXIDES; PHASE STRUCTURE; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; THICKNESS MEASUREMENT; TRANSITION METALS; VANADIUM ALLOYS; VANADIUM COMPOUNDS;

ALCRVN; APPLIED BIAS VOLTAGES; ARC EVAPORATIONS; CHEMICAL COMPOSITIONS; COATING THICKNESS; COMMERCIAL COATINGS; DEPTH DISTRIBUTIONS; ELEMENT MAPPING; FACE-CENTERED CUBIC; HEXAGONAL CLOSE-PACKED; LOW BIAS; OXIDATION BEHAVIORS; OXIDIZED COATINGS; SI(1 0 0 ); SINGLE-PHASE STRUCTURES; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRIES; TOF-SIMS; VANADIUM OXIDES;

HARD COATINGS;

EID: 63449131705     PISSN: 16182642     EISSN: 16182650     Source Type: Journal    
DOI: 10.1007/s00216-008-2525-7     Document Type: Article

References (15)

1. N Fateh GA Fontalvo G Gassner C Mitterer 2007 Tribol Lett 28 1 7
2. N Fateh GA Fontalvo C Mitterer 2008 Tribol Lett 30 21 26
3. N Fateh GA Fontalvo G Gassner C Mitterer 2007 Wear 262 1152 1158
4. R Franz J Neidhardt C Mitterer B Schaffer H Hutter R Kaindl R Tessadri M Lechthaler P Polcik 2008 J Vac Sci Technol 26 302 308
5. E Spain JC Avelar-Batista M Letch J Housden B Lerga 2005 Surf Coat Technol 200 1507 1513
6. A Glaser S Surnev FP Netzer N Fateh GA Fontalvo C Mitterer 2007 Surf Sci 601 1153 1159
7. R Kaindl B Sartory J Neidhardt R Franz A Reiter P Polcik R Tessadri C Mitterer 2007 Anal Bioanal Chem 389 1569 1576
8. P Konarski K Kaczorek M Cwil J Marks 2008 Vacuum 82 1133 1136
9. S Dreer P Wilhartitz B Sartory R Tessadri K Piplits KE Mayerhofer 2006 Michrochimica Acta 155 125 128
10. R Franz J Neidhardt B Sartory R Kaindl R Tessadri P Polcik VH Derflinger C Mitterer 2007 Tribol Lett 23 101 107
11. R Franz J Neidhardt B Sartory R Tessadri C Mitterer 2008 Thin Solid Films 516 6151 6157
12. Niehuis E, Grehl T (2001) Dual beam depth profiling. In: Vickermann JC, Briggs D (Eds) ToF-SIMS: Surface analysis by mass spectrometry. IM Publications: Chichester, UK, pp 753-778
13. T Grehl R Moellers E Niehuis 2003 Appl Surf Sci 203 277 280
14. J Schnöller R Wiesinger C Kleber U Hilfrich M Schreiner H Hutter 2008 Analytical an Bioanalytical Chemistry 390 1543 1549
15. Wilson RG, Stevie FA, Magee CW (1989) Secondary ion mass spectrometry. Wiley, New York