Oxidation and diffusion processes during annealing of AlCrVN hard coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 2, 2008, Pages 302-308

  Franz, R ^a   Neidhardt, J ^a   Mitterer, C ^a   Schaffer, B ^b   Hutter, H ^c   Kaindl, R ^d   Sartory, B ^d   Tessadri, R ^d   Lechthaler, M ^e   Polcik, P ^f  

^a UNIVERSITY OF LEOBEN   (Austria)

^b GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^d UNIVERSITY OF INNSBRUCK   (Austria)

^e Oerlikon Balzers Coating   (Liechtenstein)

^f PLANSEE COMPOSITE MATERIALS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ANNEALING; DIFFUSION; OXIDATION; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY;

INNER OXIDE LAYERS; LUBRICIOUS OXIDES; REACTIVE ARC EVAPORATION; VANADIUM DIFFUSION;

HARD COATINGS;

EID: 40249096213     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2841508     Document Type: Article

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