Accurate determination of trace amounts of oxygen in CrAlN hard coatings by a combination of WDS-EPMA and SIMS

Microchimica Acta

Volumn 155, Issue 1-2, 2006, Pages 125-128

  Dreer, Sabine ^a   Wilhartitz, Peter ^a   Sartory, Bernhard ^a   Tessadri, Richard ^a   Piplits, Kurt ^b   Mayerhofer, Karl Emanuel ^b  

^a UNIVERSITY OF INNSBRUCK   (Austria)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

EPMA; Hard coating; Light elements; Oxygen quantification; SIMS

Indexed keywords

EID: 33748553726     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-006-0529-6     Document Type: Conference Paper

References (8)

1. Reiter A E, Derflinger V H, Hanselmann B, Bachmann T, Sartory B (2006) Surf Coat Technol (submitted)
2. Ishikawa T (2004) Hard film and hard film coated tool. Hitachi Tool Engineering Ltd., Narita-shi Chiba-ken, Japan. EP 1 422 311 A3, Patent
3. Dreer S, Wilhartitz P (2004) Pure Appl Chem 76(6): 1161
4. Dreer S, Wilhartitz P, Piplits K, Hutter H, Kopnarski M, Friedbacher G (2000) Microchim Acta 133(1-4): 75
5. Bastin G F, Heijligers H J M (1991) Nonconductive specimens in the electron probe microanalyzer - a hitherto poorly discussed problem. In: Heinrich F J, Newbury D E (eds) Electron Probe Quant. Plenum, New York, N. Y. Conference, pp 163-175
6. Bastin G F, Heijligers HIM (1988) Microbeam Anal (San Francisco) 23: 325
7. Dreer S, Wilhartitz P, Mersdorf E, Friedbacher G (1999) Microchim Acta 130(4): 281
8. Kern A (1998) Hochtemperatur-Rietveldanaly sen : Möglichkeiten und Grenzen. Ruprechts-Karls-Universität, Heidelberg, Germany, Band 89