SIMS and GDMS depth profile analysis of hard coatings

Vacuum

Volumn 82, Issue 10, 2008, Pages 1133-1136

  Konarski, Piotr ^a   Kaczorek, Krzysztof ^a   Ćwil, Michał ^a   Marks, Jerzy ^a  

^a TELE AND RADIO RESEARCH INSTITUTE   (Poland)

Author keywords

Depth profile analysis; Glow discharge mass spectrometry (GDMS); Hard coatings; Ion sputtering; Secondary ion mass spectrometry (SIMS)

Indexed keywords

DIAPHRAGMS; IONIZATION; OPTICAL RESOLVING POWER; PLASMA DEPOSITION; SECONDARY ION MASS SPECTROMETRY;

DEPTH PROFILE ANALYSIS; DIGITALLY CONTROLLED SPIRAL SCANNING; GLOW DISCHARGE MASS SPECTROMETRY (GDMS); ION SPUTTERING;

HARD COATINGS;

EID: 43449095695     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.01.041     Document Type: Article

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