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Volumn 3, Issue , 2004, Pages 362-365

The measurement of ferroelectric thin films using piezo force microscopy

Author keywords

AFM; Characterisation; Ferroelectric; Piezo force microscopy; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; COUPLED CIRCUITS; DATA STORAGE EQUIPMENT; ELECTRIC SIGNAL SYSTEMS; FERROELECTRIC MATERIALS; MICROELECTROMECHANICAL DEVICES;

EID: 6344280230     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.