Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 2, Issue , 2003, Pages 420-423

  Xie, Huikai ^a,d   Fedder, Gary K ^a,b   Pan, Zhiyu ^c   Frey, Wilhelm ^c  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

^d J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

3 axis accelerometer; CMOS MEMS; Integrated accelerometer; Vertical comb finger sensing

Indexed keywords

3-AXIS ACCELEROMETERS; CMOS-MEMS; DEEP REACTIVE-ION-ETCH (DRIE); INTEGRATED ACCELEROMETERS; VERTICAL COMB FINGER SENSING;

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DRY ETCHING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING; THIN FILMS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 6344278126     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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