MEMS resonator tuning using focused ion beam platinum deposition

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 3, Issue , 2004, Pages 421-424

  Enderling, S ^a   Jiang, Liudi ^a   Ross, A W S ^a   Bond, S ^a   Hedley, J ^b   Harris, A J ^b   Burdens, J S ^b   Cheung, R ^a   Zorman, C A ^c   Mehregany, M ^c   Walton, A J ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Focused ion beam; Frequency tuning; Resonators

Indexed keywords

DAMPING; ELECTRODEPOSITION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PLATINUM; RESONATORS; THICKNESS MEASUREMENT; TUNING;

BRIDGE RESONATORS; FOCUSED ION BEAMS (FIB); FREQUENCY TUNING; MICROMECHANICAL BEAM RESONATORS;

ION BEAM ASSISTED DEPOSITION;

EID: 6344237146     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Frank D. Bannon, III, John R. Clark and Clark T.-C. Nguyen, IEEE Journal of Solid-State Circuits, vol. 35, no. 4, pp. 512-526, 2000.
2. Daphne Joachim and Liwei Lin, IEEE Journal of Microelectromechanical Systems, vol. 12, no. 2, pp. 193-200, 2003.
3. Kun Wang, Ark-Chew Wong and Clark T.-C. Nguyen, Transducers'97, vol. 1, pp.109-112, 1997.
4. Mu Chiao and Liwei Lin, Transducers'03, pp. 1820-1823, 2003.
5. R. Ramesham and R. Ghaffarian, Electronic Components and Technology Conf., pp. 666-675, 2000.
6. R.R.A. Syms and D.F. Moore, IEE Electronics Letters, vol. 35, no. 15, pp. 1277- 1278, 1999.
7. Liudi Jiang, R. Cheung, M. Hassan, A.J. Harris, J.S. Burdess, C.A. Zorman and M. Mehregany, accepted for publication in Journal of Vacuum Science and Technology B, 2003.
8. John Hedley, Alun Harris, Jim Burdess and Mark McNie, Proceedings of the SPIE, vol. 4408, pp. 402-408, 2001.
9. Lijun Tong, Mehran Mehregany and Lawrence G. Matus, Applied Physics Letters, vol. 60, no. 24, pp. 2992-2994, 1992.
10. S. Roy, A.K. McIlwain, R.G. DeAnna, A.J. Fleischman, R.K. Burla, C.A. Zorman and M. Mehregany Solid-State Sensor and Actuator Workshop, Hilton Head Island, pp. 22-25, 2000.
11. G.W.C. Kaye and T.H. Laby, "Tables of Physical and Chemical Constants," Longman Inc., London and New York, 15 th edition, 1986.
12. V.B.Braginsky, V.P.Mitrofanov and V.I.Panov, "Systems with Small Dissipation," The University of Chicago Press, 1985.