Algorithmic and modeling aspects in the electro-thermal simulation of thermally operated microsystems

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 2, Issue , 2003, Pages 476-479

  Rencz, M ^a   Szekely V ^d   Poppe, A ^b   Courtois, B ^c  

^a MicReD Ltd   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^c TIMA LABORATORY   (France)

^d NONE

Author keywords

Compact thermal modeling; Electro thermal simulation; MEMS simulation

Indexed keywords

ALGORITHMS; BOUNDARY CONDITIONS; CIRCUIT THEORY; COMPUTER SIMULATION; ELECTRIC POTENTIAL; HEAT LOSSES; NETWORKS (CIRCUITS);

COMPACT THERMAL MODELING; ELECTRO-THERMAL SIMULATION; THERMALLY OPERATED MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344231362     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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