Nanohole formation on AlGaAs surfaces by local droplet etching with gallium

Journal of Crystal Growth

Volumn 311, Issue 7, 2009, Pages 1839-1842

  Heyn, Ch ^a   Stemmann, A ^a   Hansen, W ^a  

^a UNIVERSITY OF HAMBURG   (Germany)

Author keywords

A1. Atomic force microscopy; A1. Diffusion; A1. Low dimensional structures; A3. Molecular beam epitaxy; B2. Semiconducting III V materials

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMS; CRYSTAL GROWTH; DROP FORMATION; ETCHING; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; MOLECULAR DYNAMICS; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM WIRES;

A1. ATOMIC FORCE MICROSCOPY; A1. DIFFUSION; A1. LOW-DIMENSIONAL STRUCTURES; A3. MOLECULAR BEAM EPITAXY; B2. SEMICONDUCTING III-V MATERIALS;

SURFACES;

EID: 63349110616     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.11.001     Document Type: Article

References (15)

1. Wang Zh.M., Liang B.L., Sablon K.A., and Salamo G.J. Appl. Phys. Lett. 90 (2007) 113120
2. Stemmann A., Heyn Ch., Köppen T., Kipp T., and Hansen W. Appl. Phys. Lett. 93 (2008) 123108
3. Koguchi N., Takahashi S., and Chikyow T. J. Crystal Growth 111 (1991) 688
4. Koguchi N., and Ishige K. Jpn. J. Appl. Phys. 32 (1993) 2052
5. Mano T., Watanabe K., Tsukamoto S., Fujioka H., Oshima M., and Koguchi N. Jpn. J. Appl. Phys. 38 (1999) L1009
6. Mano T., Watanabe K., Tsukamoto S., Koguchi N., Fujioka H., Oshima M., Lee C.D., Leem J.Y., Lee H.J., and Noh S.K. Appl. Phys. Lett. 76 (2000) 3543
7. Watanabe K., Koguchi N., and Gotoh Y. Jpn. J. Appl. Phys. 39 (2000) L79
8. Yamagiwa M., Mano T., Kuroda T., Tateno T., Sakoda K., Kido G., and Koguchi N. Appl. Phys. Lett. 89 (2006) 113115
9. Heyn Ch., Stemmann A., Schramm A., Welsch H., Hansen W., and Nemcsics A. Appl. Phys. Lett. 90 (2007) 203105
10. Heyn Ch., Stemmann A., Schramm A., Welsch H., Hansen W., and Nemcsics A. Phys. Rev. B 76 (2007) 075317
11. Mano T., and Koguchi N. J. Crystal Growth 278 (2005) 108
12. Kuroda T., Mano T., Ochiai T., Sanguinetti S., Sakoda K., Kido G., and Koguchi N. Phys. Rev. B 72 (2005) 205301
13. Mano T., Kuroda T., Sanguinetti S., Ochiai T., Tateno T., Kim J.S., Noda T., Kawabe M., Sakoda K., Kido G., and Koguchi N. Nano Lett. 5 (2005) 425
14. Huang S., Niu Z., Fang Z., Ni H., Gong Z., and Xia J. Appl. Phys. Lett. 89 (2006) 031921
15. Liang B.L., Wang Zh.M., Lee J.H., Sablon K., Mazur Yu.I., and Salamo G.J. Appl. Phys. Lett. 89 (2006) 043113