Local droplet etching of nanoholes and rings on GaAs and AlGaAs surfaces

Applied Physics Letters

Volumn 93, Issue 12, 2008, Pages

  Stemmann, A ^a   Heyn, Ch ^a   Koppen T ^a   Kipp, T ^a   Hansen, W ^a  

^a UNIVERSITY OF HAMBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DROP FORMATION; DROPS; FLUID MECHANICS; GALLIUM; GALLIUM ALLOYS; OPTICAL DESIGN; SEMICONDUCTING GALLIUM;

ETCHING TEMPERATURE; LOWER DENSITY; NANO-HOLES; ULTRA LOW DENSITY;

ETCHING;

EID: 52949110161     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2981517     Document Type: Article

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