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Volumn 44, Issue 6, 2009, Pages 1156-1175

Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges

Author keywords

3 RRR; Compliant mechanism; Finite element analysis; Flexure hinge; Kinetostatic model

Indexed keywords

EQUATIONS OF MOTION; HINGES; MECHANICAL ENGINEERING; MECHANISMS;

EID: 63149192768     PISSN: 0094114X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechmachtheory.2008.09.005     Document Type: Article
Times cited : (139)

References (24)
  • 1
    • 0018222158 scopus 로고
    • Piezodriven 50-μm range stage with subnanometer resolution
    • Scire F., and Teague E. Piezodriven 50-μm range stage with subnanometer resolution. Review of Scientific Instruments 49 12 (1978) 1735-1740
    • (1978) Review of Scientific Instruments , vol.49 , Issue.12 , pp. 1735-1740
    • Scire, F.1    Teague, E.2
  • 3
    • 0029755070 scopus 로고    scopus 로고
    • Design and characterisation of a low-profile micropositioning stage
    • Yang R., Jouaneh M., and Schweizer R. Design and characterisation of a low-profile micropositioning stage. Precision Engineering 18 (1996) 20-29
    • (1996) Precision Engineering , vol.18 , pp. 20-29
    • Yang, R.1    Jouaneh, M.2    Schweizer, R.3
  • 4
    • 0142125907 scopus 로고    scopus 로고
    • Modeling of flexure-hinge type lever mechanisms
    • Jouaneh M., and Yang R. Modeling of flexure-hinge type lever mechanisms. Precision Engineering 27 (2003) 407-418
    • (2003) Precision Engineering , vol.27 , pp. 407-418
    • Jouaneh, M.1    Yang, R.2
  • 5
    • 0142011518 scopus 로고    scopus 로고
    • Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms
    • Lobontiu N., and Garcia E. Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms. Computers and Structures 81 (2003) 2797-2810
    • (2003) Computers and Structures , vol.81 , pp. 2797-2810
    • Lobontiu, N.1    Garcia, E.2
  • 6
    • 17844402728 scopus 로고    scopus 로고
    • A mathematical approach for analysing ultra precision positioning system with compliant mechanism
    • Park S., and Yang S. A mathematical approach for analysing ultra precision positioning system with compliant mechanism. Journal of Materials Processing Technology 164-165 (2005) 1584-1589
    • (2005) Journal of Materials Processing Technology , vol.164-165 , pp. 1584-1589
    • Park, S.1    Yang, S.2
  • 7
    • 34250619628 scopus 로고    scopus 로고
    • A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: design and experimental validation
    • Choi S., Han S., Han Y., and Thompson B. A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: design and experimental validation. Mechanism and Machine Theory 42 9 (2007) 1184-1198
    • (2007) Mechanism and Machine Theory , vol.42 , Issue.9 , pp. 1184-1198
    • Choi, S.1    Han, S.2    Han, Y.3    Thompson, B.4
  • 8
    • 0031176660 scopus 로고    scopus 로고
    • Optimal design of a flexure hinge based xyθ wafer stage
    • Ryu J.W., Gweon D., and Moon K.S. Optimal design of a flexure hinge based xyθ wafer stage. Precision Engineering 21 (1997) 18-28
    • (1997) Precision Engineering , vol.21 , pp. 18-28
    • Ryu, J.W.1    Gweon, D.2    Moon, K.S.3
  • 9
    • 24944497189 scopus 로고    scopus 로고
    • Stiffness modeling of flexure parallel mechanism
    • Pham H.-H., and Chen I.-M. Stiffness modeling of flexure parallel mechanism. Precision Engineering 29 (2005) 467-478
    • (2005) Precision Engineering , vol.29 , pp. 467-478
    • Pham, H.-H.1    Chen, I.-M.2
  • 10
    • 0028499414 scopus 로고
    • A linear scheme for the displacement analysis of micropositioning stages with flexure hinges
    • Her I., and Chang J.C. A linear scheme for the displacement analysis of micropositioning stages with flexure hinges. Journal of Mechanical Design, Transactions ASME 116 (1994) 770-776
    • (1994) Journal of Mechanical Design, Transactions ASME , vol.116 , pp. 770-776
    • Her, I.1    Chang, J.C.2
  • 12
    • 0036567350 scopus 로고    scopus 로고
    • Design of symmetric conic-section flexure hinges based on closed-form compliance equations
    • Lobontiu N., Paine J.S., Garcia E., and Goldfarb M. Design of symmetric conic-section flexure hinges based on closed-form compliance equations. Mechanism and Machine Theory 37 (2002) 477-498
    • (2002) Mechanism and Machine Theory , vol.37 , pp. 477-498
    • Lobontiu, N.1    Paine, J.S.2    Garcia, E.3    Goldfarb, M.4
  • 13
    • 0001494660 scopus 로고    scopus 로고
    • A finite-element-based method to determine the spatial stiffness properties of a notch hinge
    • Zhang S., and Fasse E.D. A finite-element-based method to determine the spatial stiffness properties of a notch hinge. Journal of Mechanical Design 123 (2001) 141-147
    • (2001) Journal of Mechanical Design , vol.123 , pp. 141-147
    • Zhang, S.1    Fasse, E.D.2
  • 14
    • 9944222692 scopus 로고    scopus 로고
    • Dimensionless design graphs for flexure elements and a comparison between three flexure elements
    • Schotborgh W.O., Kokkeler F.G., Tragter H., and van Houten F.J. Dimensionless design graphs for flexure elements and a comparison between three flexure elements. Precision Engineering 29 (2005) 41-47
    • (2005) Precision Engineering , vol.29 , pp. 41-47
    • Schotborgh, W.O.1    Kokkeler, F.G.2    Tragter, H.3    van Houten, F.J.4
  • 15
    • 0000112064 scopus 로고
    • How to design flexure hinges
    • Paros J.M., and Weisbord L. How to design flexure hinges. Machine Design 37 (1965) 151-156
    • (1965) Machine Design , vol.37 , pp. 151-156
    • Paros, J.M.1    Weisbord, L.2
  • 16
    • 39049148051 scopus 로고    scopus 로고
    • Review of circular flexure hinge design equations and derivation of empirical formulations
    • Yong Y.K., Lu T.-F., and Handley D.C. Review of circular flexure hinge design equations and derivation of empirical formulations. Precision Engineering 32 2 (2008) 63-70
    • (2008) Precision Engineering , vol.32 , Issue.2 , pp. 63-70
    • Yong, Y.K.1    Lu, T.-F.2    Handley, D.C.3
  • 17
    • 38549091765 scopus 로고    scopus 로고
    • The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages
    • Yong Y.K., and Lu T.-F. The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages. Mechanism and Machine Theory 43 (2008) 347-363
    • (2008) Mechanism and Machine Theory , vol.43 , pp. 347-363
    • Yong, Y.K.1    Lu, T.-F.2
  • 19
    • 63149105264 scopus 로고    scopus 로고
    • A simple and efficient modelling method for planar flexure hinge compliant mechanisms
    • submitted for publication
    • D. Handley, T.-F. Lu, Y.K. Yong, A simple and efficient modelling method for planar flexure hinge compliant mechanisms, Precision Engineering, submitted for publication.
    • Precision Engineering
    • Handley, D.1    Lu, T.-F.2    Yong, Y.K.3
  • 20
    • 0034155614 scopus 로고    scopus 로고
    • RCC characteristics of planar/spherical three degree-of-freedom parallel mechanisms with joint compliances
    • Kim W.-K., Yi B.-J., and Cho W. RCC characteristics of planar/spherical three degree-of-freedom parallel mechanisms with joint compliances. Journal of Mechanical Design 122 (2000) 10-16
    • (2000) Journal of Mechanical Design , vol.122 , pp. 10-16
    • Kim, W.-K.1    Yi, B.-J.2    Cho, W.3
  • 23
    • 0036684894 scopus 로고    scopus 로고
    • Design calculations for flexure hinges
    • Wu Y., and Zhou Z. Design calculations for flexure hinges. Review of Scientific Instruments 73 8 (2002) 3101-3106
    • (2002) Review of Scientific Instruments , vol.73 , Issue.8 , pp. 3101-3106
    • Wu, Y.1    Zhou, Z.2
  • 24
    • 18544390811 scopus 로고    scopus 로고
    • Notch flexure hinges: an effective theory
    • Tseytlin Y.M. Notch flexure hinges: an effective theory. Review of Scientific Instruments 73 9 (2002) 3363-3368
    • (2002) Review of Scientific Instruments , vol.73 , Issue.9 , pp. 3363-3368
    • Tseytlin, Y.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.