A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation

Mechanism and Machine Theory

Volumn 42, Issue 9, 2007, Pages 1184-1198

  Choi, S B ^a   Han, S S ^a   Han, Y M ^a   Thompson, B S ^b  

^a Inha University   (South Korea)

^b Michigan State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; COMPUTER SIMULATION; HINGES; LAGRANGE MULTIPLIERS; MACHINE DESIGN;

MAGNIFICATION DEVICES; PRECISION MAGNIFICATION MECHANISMS; SINUSOIDAL TRAJECTORIES;

PIEZOELECTRIC ACTUATORS;

EID: 34250619628     PISSN: 0094114X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechmachtheory.2006.08.009     Document Type: Article

References (21)

1. Yonezawa H., Hirata Y., and Sasai H. Positioning table with high accuracy and high speed. Annals of the CIRP 39 1 (1990) 433-436
2. Sakuta S., Ogawa K., and Ueda K. Experimental studies on ultra-precision positioning. International Journal of the Japan Society of Precision Engineering 27 3 (1993) 235-240
3. Kim J.D., and Nam S.R. An improvement of positioning accuracy by use of piezoelectric voltage in piezoelectric driven micropositioning system simulation. Mechanism and Machine Theory 30 6 (1995) 819-827
4. Ge P., and Jouaneh M. Tracking control of a piezoceramic actuator. IEEE Transaction on Control Systems Technology 4 3 (1996) 209-216
5. Choi S.B., Kim H.K., Lim S.C., and Park Y.P. Position tracking control of an optical pick-up device using piezoceramic actuator. Mechatronics 11 6 (2001) 691-705
6. Howell L.L., and Midha A. A loop-closure theory for the analysis and synthesis of compliant mechanisms. Mechanism and Machine Theory 118 1 (1996) 121-125
7. Howell L.L., and Midha A. A method for the design of compliant mechanisms with small-length flexural pivots. Mechanism and Machine theory 116 1 (1994) 270-290
8. Lobontiu N., and Garcia E. Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms. Computers and Structures 81 32 (2003) 2797-2810
9. Lobontiu N., Paine J.S.N., and Goldfarb M. Corner-filleted flexure hinges. Journal of Mechanical Design 123 3 (2001) 346-352
10. Jensen B.D., and Howell L.L. The modeling of cross-axis flexural pivots. Mechanism and Machine Theory 37 5 (2002) 461-476
11. Paros J.M., and Weisbord L. How to design flexure hinge. Machine Design 37 (1965) 151-157
12. Smith S.T., Chetwynd D.G., and Bowen D.K. Design and assessment of monolithic high precision translation mechanism. Journal of Physics E: Scientific Instruments 20 (1988) 977-983
13. Y. Rong, Y. Zhu, Z. Luo, X. Liu, Design and analysis of flexure-hinge mechanism used in micro-positioning stage, in: Proceedings of the 1993 JSME International Conference on Advanced Mechatronics, 1993, pp. 577-582.
14. Xu W., and King T. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations. Precision Engineering 19 1 (1996) 4-10
15. Furukawa E., Mizuno M., and Terada K. A magnifying mechanism for use on piezo-driven mechanisms. International Journal of the Japan Society of Precision Engineering 25 4 (1991) 315-320
16. Scire F.E., and Teague E.C. Piezodriven 50-range stage with subnanometer resolution. Review of Scientific Instruments 49 12 (1978) 1735-1740
17. Yang R., Jouaneh M., and Schweizer R. Design and characterization of a low-profile micropositioning stage. Precision Engineering 18 1 (1996) 20-29
18. S.S. Han, Precision positioning control of smart dual-servo stage featuring piezostack actuator and ER clutch, Ph.D. dissertation, Inha University, 2003.
19. Otsuka J., Takahashi M., Usuda T., and Tofuku M. Study of precision positioning by friction drive (2nd Report) - trapezoidal velocity control. International Journal of the Japan Society of Precision Engineering 26 4 (1992) 315-320
20. Han Y.M., Lim S.C., Lee H.G., Choi S.B., and Choi H.J. Hysteresis identification of polymethylaniline-based ER fluid using Preisach model. Materials and Design 24 1 (2003) 53-61
21. Doong T., and Mayergoyz I. On numerical implementation of hysteresis model. IEEE Transactions on Magnetics 21 (1985) 1853-1855