Drag force micro solid state silicon plate wind velocity sensor

Sensors and Actuators, A: Physical

Volumn 151, Issue 1, 2009, Pages 35-41

  Du, Lidong ^a,b   Zhao, Zhan ^a   Pang, Cheng ^a,b   Fang, Zhen ^a  

^a INSTITUTE OF ELECTRONICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Drag force; Platinum resistor; Silicon plate; Wind velocity sensor

Indexed keywords

COMPUTER SOFTWARE; CONTACTS (FLUID MECHANICS); FLUID MECHANICS; NANOCANTILEVERS; NONMETALS; PLATINUM; RESISTORS; SENSORS; VELOCITY;

ANSYS SOFTWARES; DRAG FORCE; HIGH SENSITIVITIES; HIGH WINDS; MICRO-SOLIDS; PLATINUM RESISTOR; SILICON PLATE; SILICON SUBSTRATES; WIND DIRECTIONS; WIND SENSORS; WIND VELOCITY SENSOR;

DRAG;

EID: 63049091665     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.02.003     Document Type: Article

References (16)

1. Laghrouche M., Adane A., Boussey J., Ameur S., Meunier D., and Tardu S. A miniature silicon hot wire sensor for automatic wind speed measurements. Renewable Energy 30 (2005) 1881-1896
2. Buder U., Petz R., Kittel M., Nitsche W., and Obermeier E. AeroMEMS polyimide based wall double hot-wire sensors for flow separation detection. Sensors and Actuators A 142 (2008) 130-137
3. Nguyen N.T. A novel wind sensor concept based on thermal image measurement using a temperature sensor array. Sensors and Actuators A: Physical 110 (2004) 323-327
4. Nguyen N.T. A novel thermal sensor concept for flow direction and flow velocity. IEEE Sensors Journal 5 (2005) 1224-1234
5. van der Wiel A.J., Boillat M.A., and de Rooij N.F. A bi-directional silicon orifice flow sensor characterized for fluid temperature and pressure. The 8th International Conference on Solid-State and Actuators and Eurosensors IX. Stockholm, Sweden, June 25-29 (1995) 420-423
6. Zhang L., Ye X., Zhou Z., and Yao J. A micromachined single crystal silicon flow sensor with cantilever paddle. International Symposium on Micromechatronics and Human Science. Nagoya, Japan, October (1997) 225-229
7. Richter M., Wackerle M., Woias P., and Hillerich B. A novel flow sensor with high time resolution based on differential pressure principle". Proceedings of MEMS'99, 12th IEEE International Workshop Micro Electromechanical System. Orlando, FL, January 17-21 (1999) 118-123
8. Zhifang Fan, Jack Chen, Jun Zou, Davis Bullen, ChangLiu, and Fres Delcomyn. Design and fabrication of artificial lateral line flow sensors. Journal of Micromechanics and Microengineering 12 (2002) 655-661
9. Ozaki Yoshihiro, Tomoyuki Ohyama, Takashi Yasuda, and Isao Shimoyama. An air flow sensor modeled on wind receptor hairs of insects. Proceeding of MEMS'00, 13th IEEE International Workshop Micro Electromechanical System. Miyazaci, Japan, January 23-27 (2000) 531-536
10. Argyrakis P., Hamilton A., Webb B., Zhang Y., Gonos T., and Cheung R. Fabrication and characterization of a wind sensor for integration with a neuron circuit. Microelectronic Engineering 84 (2007) 1749-1753
11. Gass V., van der Shoot B.H., and de Rooij N.F. Nanofluid handling by micro-flow-sensor based on drag force measurements. Proceeding of MEMS 93, 6th IEEE International Workshop Micro Electromechanical System. San Diego, CA, January 25-28 (1993) 167-172
12. Niklas Svendin, Edvard Kälvesten, and Göran Stemme. A lift force sensor with integrated hot-chips for wide range flow measurements. Sensors and Actuators A 109 (2003) 120-130
13. Niklas Svendin, Edvard Kälvesten, and Göran Stemme. A new edge-detected lift force flow sensor. Journal of Microelectromechanical System 12 (2003) 344-354
14. Gregory T.A., and Kovacs. Micromachined Transducers Sourcebook (2001), McGraw-Hill Companies Education Inc., America p.213
15. Dally J.W., Riley W.F., and McConnell K.G. Instrumentation for Engineering Measurements. second ed. (1993), Wiley pp. 171-176
16. Du L., Zhao Z., and Pang C. Design and fabrication MEMS-based micro solid state cantilever wind speed sensor. Proceedings of the 2007 International Conference on Information Acquisition. Korea, July 9-11 (2007)