Design and fabrication MEMS-based micro solid state cantilever wind speed sensor

Proceedings of the 2007 International Conference on Information Acquisition, ICIA

Volumn , Issue , 2007, Pages 336-340

  Du, Lidong ^a   Zhao, Zhan ^a   Pang, Cheng ^a  

^a INSTITUTE OF ELECTRONICS   (China)

Author keywords

ANSYS analysis; MEMS technology; Silicon cantilever; Wheatstone bridge; Wind speed

Indexed keywords

BRIDGE CIRCUITS; COMPOSITE MICROMECHANICS; CONTACTS (FLUID MECHANICS); ELECTRON BEAM LITHOGRAPHY; ETCHING; FLUID MECHANICS; MEMS; MERGERS AND ACQUISITIONS; MICROELECTROMECHANICAL DEVICES; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; PLATINUM; POWER CONTROL; REACTIVE ION ETCHING; SENSORS; SILICON; SILICON WAFERS; SPEED; WIND EFFECTS;

ANSYS SOFTWARE; DEEP REACTIVE ION ETCHING (DRIV); HIGH SENSITIVITY (HS); INFORMATION ACQUISITIONS; INTERNATIONAL CONFERENCES; LOW WIND SPEED; SILICON CANTILEVERS; SMALL SIZE; SOLID STATES; WET ANISOTROPIC ETCHING; WHEATSTONE BRIDGES; WIND SPEED (WS);

DETECTORS;

EID: 47349123408     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIA.2007.4295754     Document Type: Conference Paper

References (5)

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