AeroMEMS polyimide based wall double hot-wire sensors for flow separation detection

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 130-137

  Buder, Ulrich ^a   Petz, Ralf ^a   Kittel, Moritz ^a   Nitsche, Wolfgang ^a   Obermeier, Ernst ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Flexible sensor array; Flow measurement; MEMS; Polyimide; Separation; Wall hot wire

Indexed keywords

FLOW MEASUREMENT; MEMS; MICROSENSORS; PRINTED CIRCUIT BOARDS; RESISTORS; SENSOR ARRAYS; WIND TUNNELS;

FLEXIBLE SENSOR ARRAYS; FLOW REATTACHMENT; HYBRID ARRAYS;

POLYIMIDES;

EID: 38949135113     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.058     Document Type: Article

References (8)

1. Bruun H.H. Hot-Wire Anemometry. first ed. (1995), Oxford University Press, Oxford p. 1
2. Freymuth P. Frequency response and electronic testing for constant temperature hot-wire anemometers. J. Phys. E 10 (1977) 705-710
3. Buder U., Berns A., Klitzing J.-P.v., Petz R., Nitsche W., and Obermeier E. AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations on curved surfaces. Proceedings 4th IEEE Conference on Sensors. Irvine, CA, U.S.A., October 31-November 3 (2005) 545-548
4. Thun R.E., Caudle G.F., and Pasciutti E.R. Rugged film resistor thermometer for measurement of surface temperatures. Rev. Scientific Instrum. 31 4 (1960) 446-449
5. Buder U., Klitzing J.-P.v., and Obermeier E. Bulk micromachining of polyimide by reactive ion etching. Sens. Actuators A 132/1 (2006) 393-399
6. Buder U., Klitzing J.P.v., and Obermeier E. Bulk micromachining of polyimide for AeroMEMS flowsensors using reactive ion etching. Proceedings Eurosensors XIX. Barcelona, Spain, September 11-14 (2005) Paper No. MC 11
7. Buder U., Berns A., Klitzing J.-P.v., Petz R., Nitsche W., and Obermeier E. A family of micromachined wall hot-wire sensors on polyimide foil for measurement on aerodynamic surfaces. Proceedings 44th AIAA Aerospace Sciences Meetings and Exhibit. Reno, NV, U.S.A, January 9-12 (2006) Paper No. AIAA 2006-1244
8. C. Dobriloff, Optimierung der Anregeparameter für eine aktive Beeinflussung der Strömungsablösung an der Hinterkantenklappe einer generischen Hochauftriebskonfiguration, Diplomarbeit (Master Thesis), Technical University of Berlin, June 2005.