Aberration budget in extreme ultraviolet lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Nakajima, Yumi ^a   Sato, Takashi ^a   Inanami, Ryoichi ^a   Nakasugi, Tetsuro ^a   Higashiki, Tatsuhiko ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Aberration tolerance; EUV lithography; Mask induced aberration; Zernike sensitivity

Indexed keywords

22 NM PATTERN; ABERRATION TOLERANCE; ARF LITHOGRAPHY; MASK-INDUCED ABERRATION; PATTERN PERIODICITY; PATTERN SHIFTS; ZERNIKE;

EXTREME ULTRAVIOLET LITHOGRAPHY; SENSITIVITY ANALYSIS; SPECIFICATIONS;

LITHOGRAPHY;

EID: 62649166378     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.771602     Document Type: Conference Paper

References (7)

1. T. A. Brunner, "Impact of lens aberrations on optical lithography, " IBM Journal of Research and Development, Volume 41, Numbers 1/2 (1997).
2. T. Nakashima et al., "Evaluation of Zernike sensitivity method for CD distribution, " Proc. of SPIE Vol. 5040, pp.1600-1610 (2003).
3. Y. Shiode et al., "Method of Zernike Coefficients Extraction for Optics Aberration Measurement, " Proc. of SPIE Vol. 4691, pp1453-1464 (2002). (Pubitemid 35298791)
4. P. Yan, "Understanding Bossung Curve Asymmetry and Focus Shift Effect in EUV Lithography, " Proc. of SPIE Vol. 4562, pp.279-287 (2002). (Pubitemid 35187502)
5. C. Krautschik et al., "The Impact of the EUV mask Phase Response on the Asymmetry of Bossung Curves as Predicted By Rigorous EUV Mask Simulations, " Proc. of SPIE Vol. 4343, pp.392-401 (2001). (Pubitemid 32993434)
6. M. Sugawara et al., "Mask Pattern Correction by Energy Loss Compensation of Extreme Ultraviolet Lithography, " Jpn. J. Appl. Phys., Vol 44, No. 7B, pp5467-5473 (2005). (Pubitemid 43182942)
7. M. Sugawara et al., "Analysis of Asymmetry of Printed Image by Off-Axis Incident Light onto Reflective Mask in Extreme Ultraviolet Lithography, " Jpn. J. Appl. Phys., Vol 44, No. 12, pp8409-8421 (2005). (Pubitemid 43166717)