Evaluation of Zernike sensitivity method for CD distribution

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 III, Issue , 2003, Pages 1600-1610

  Nakashima, Toshiharu ^a   Slonaker, Steven D ^b   Kudo, Takehito ^a   Hirukawa, Shigeru ^a  

^a NIKON CORPORATION   (Japan)

^b NIKON PRECISION INC   (United States)

Author keywords

CD distribution; CD focus; Defocus; Response surface; Wavefront aberration; Zernike sensitivity method

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; FOCUSING; LENSES; POLYNOMIALS; SENSITIVITY ANALYSIS; WAVEFRONTS;

AERIAL IMAGE; LINEWIDTH ABNORMALITY; TOTAL FOCUS DEVIATION; ZERNIKE POLYNOMIALS; ZERNIKE SENSITIVITY;

LITHOGRAPHY;

EID: 0141832921     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485454     Document Type: Conference Paper

References (1)

1. T. Nakashima, et al., "Impact of Zernike cross-term on linewidth control", Proc. SPIE Vol. 4691, p.33, 2002