Thermoelastic damping in GaAs micromechanical resonators

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 9, 2008, Pages 2920-2922

  Okamoto, Hajime ^a   Ito, Daisuke ^b   Onomitsu, Koji ^a   Yamaguchi, Hiroshi ^a,b  

^a Bio Medical Informatics Research Center   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING EFFECT; DAMPING MECHANISMS; GAAS; HIGH-SENSITIVITY; INDUCED TEMPERATURE; MECHANICAL DAMPING; MECHANICAL MOTIONS; MECHANICAL RESONATORS; MICRO-CANTILEVERS; MICROMECHANICAL RESONATOR; OPERATING TEMPERATURE; TEMPERATURE DEPENDENCE; TEMPERATURE GRADIENT; THERMOELASTIC DAMPING;

ATOMIC FORCE MICROSCOPY; GALLIUM ALLOYS; GALLIUM ARSENIDE; NANOCANTILEVERS; RESONATORS; SEMICONDUCTING GALLIUM; THERMAL EXPANSION; THERMAL GRADIENTS; THERMOELASTICITY;

DAMPING;

EID: 62549128409     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200779224     Document Type: Conference Paper

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