Miniaturized thin film thermal vacuum sensor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 6, 1995, Pages 2980-2985

  Alvesteffer, W J ^a   Jacobs, D C ^a   Baker, D H ^a  

^a Teledyne Brown Engineering Hastings Instruments ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1842447961     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579624     Document Type: Article

References (7)

1. M. Pirani, Verh. Deutsch. Phys. Ges. 8, 686 (1906).
2. H. Von Ubisch, Vak. Techn. 6, 175 (1957).
3. J. H. Leek, Pressure Measurement in Vacuum Systems (Chapman and Hall, London, 1957).
4. R. Jaeger, Introduction to Microelectronic Fabrication, Vol. 5 of Modular Series on Solid State Devices, edited by G. Neudeck and R. Pierret (Addison-Wesley, Reading, MA, 1988).
5. D. Elliott, Integrated Circuit Fabrication Technology (McGraw-Hill, New York, 1982).
6. K. Chopra, Thin Fim Phenomena (McGraw-Hill, New York, 1982).
7. R. L. Powell, American Institute of Physics Handbook, 2nd ed., edited by B. Billings et. al. (McGraw-Hill, New York, 1963), Chap. 4, Sec. gg, pp. 81–82.