Analysis of the nonlinear dynamic stability for an electrically actuated viscoelastic microbeam

Microsystem Technologies

Volumn 15, Issue 5, 2009, Pages 763-769

  Fu, Y M ^a   Zhang, Jin ^a   Bi, R G ^a  

^a HUNAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; GALERKIN METHODS; STABILITY;

AXIAL FORCES; ELECTROSTATIC LOADS; EULER-BERNOULLI; GEOMETRIC NON-LINEAR; MICRO BEAMS; NONLINEAR DYNAMIC STABILITIES; NUMERICAL CALCULATIONS; STANDARD LINEAR SOLID MODELS;

NONLINEAR ANALYSIS;

EID: 62249174782     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0791-8     Document Type: Article

References (13)

1. S Abu-Salih D Elata 2004 The effect of internal stress on the electromechanical buckling of a clamped-clamped beam Proc Eur Micro Nano Syst 2004 93 96
2. S Abu-Salih D Elata 2006 Experimental validation of electromechanical buckling J Microelectromech Syst 15 6 1656 1662 10.1109/JMEMS.2006.886015
3. MH Bao H Yang H Yin SQ Shen 2000 Effects of electrostatic forces generated by the driving signal on capacitive sensing devices Sensor Actuator A 84 213 219 10.1016/S0924-4247(00)00312-5
4. K Bethe D Baumgarten J Frank 1990 Creep of sensor's elastic elements: Metals versus non- metals Sensor Actuator A 21 844 849 10.1016/0924-4247(90) 87044-J
5. Flügge W (1975) Viscoelasticity, 2nd edn. Springer, New York
6. S Krylov R Maimon 2004 Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force J Vib Acoust 126 332 342 10.1115/1.1760559
7. SL Lau YK Cheung SY Wu 1982 A variable parameter incrementation method for dynamic instability of linear and nonlinear elastic systems J Appl Mech 49 849 853
8. S Lee R Ramadoss M Buck VM Bright KC Gupta YC Lee 2004 Reliability testing of flexible printed circuit-based RF MEMS capacitive switches Microelectron Reliab 44 245 250 10.1016/j.microrel.2003.09.002
9. PM Osterberg SD Senturia 1997 M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures J Microelectromech Syst 6 2 107 118 10.1109/84.585788
10. Pelesko JA, Bernstein DH (2003) Modeling MEMS and NEMS. Chapman& Hall/CRC, Boca Raton
11. T Sasayama S Suzuki S Tsuchitani A Koide M Suzuki N Ichikawa T Nakazawa 1996 Highly reliable silicon micromachined physical sensors in mass production Sensor Actuator A 54 714 717 10.1016/S0924-4247(97)80044-1
12. MI Younis EM Abdel-Rahman AH Nayfeh 2003 A reduced-order model for electrically actuated microbeam-based MEMS J Microelectromech Syst 12 5 672 680 10.1109/JMEMS.2003.818069
13. LX Zhang YP Zhao 2003 Electromechanical model of RF MEMS switches Microsyst Technol 9 420 426 10.1007/s00542-002-0250-2