A scalable platform for integrating horizontal nanochannels with known registries to microchannels

Chemistry of Materials

Volumn 21, Issue 1, 2009, Pages 27-32

  Nikoobakht, Babak ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISPERSIVE X-RAY SPECTROSCOPIES; FOCUSED-ION BEAMS; HIGH RESOLUTION LITHOGRAPHIES; IN-SITU FABRICATIONS; NANO BUILDING BLOCKS; NANO-CHANNELS; NANO-DEVICE FABRICATIONS; NANO-DEVICES; SAPPHIRE SURFACES; ZNO NANOWIRES;

CORUNDUM; ELECTRIC WIRE; MICROCHANNELS; NANOFLUIDICS; NANOSTRUCTURED MATERIALS; NANOWIRES; PORE SIZE; ZINC OXIDE;

FABRICATION;

EID: 61849153905     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm801893z     Document Type: Article

References (22)

1. Tegenfeldt, J. O.; Prinz, C; Cao, H.; Huang, R. L.; Austin, R. H.; Chou, S. Y.; Cox, E. C; Sturm, J. C. Anal. Bioanl. Chem. 2004, 378, 1678.
2. Abgrall, P.; Gue, A.-M. J. Micromech. Microeng. 2007, 17, R15.
3. Lee, S. B.; Mitchell, D. T.; Trofin, L.; Nevanen, T. K.; Suderlund, H.; Martin, C. R. Science 2002, 296, 2198.
4. Fan, R.; Kamik, R.; Yue, M.; Li, D.; Majumdar, A.; Yang, P. D. Nano Lett. 2005, 5, 1633.
5. Kasianowicz, J. J.; Brandin, E.; Branton, D.; Deamer, D. W. Proc. Natl. Acad. Sci. U.S.A. 1996, 93, 13770.
6. Sun, L.; Crooks, R. M. J. Am. Chem. Soc. 2000, 122, 12340.
7. O'Brien II, M. J.; Bisong, P.; Ista, L. K.; Rabinovich, E. M.; Garcia, A. L.; Sibbett, S. S.; Lopez, G. P.; Brueck, S. R. J. J. Vac. Sci. Technol., B 2003, 21, 2941.
8. Czaplewski, D. A.; Kameoka, J.; Mathers, R.; Coates, G. W.; Craighead, H. G. Appl. Phys. Lett. 2003, 83, 4836.
9. Lee, C; Yang, E. H.; Myung, N. V.; George, T. Nano Lett. 2003, 3, 1339.
10. Liang, X.; Morton, K. J.; Austin, R. H.; Chou, S. Y. Nano Lett. 2007, 7, 3774.
11. Martin, C. R. Chem. Mater. 1996, 8, 1739.
12. Zhang, M.; Bando, Y.; Wada, K.; Kurashima, K. J. Mater. Sci. Lett. 1999, 18, 1911.
13. Fan, R.; Wu, Y.; Li, D.; Yue, M.; Majumdar, A.; Yang, P. J. Am. Chem. Soc. 2003, 125, 5254.
14. Kamik, R.; Fan, R.; Yue, M.; Li, D.; Yang, P.; Majumdar, A. Nano Lett. 2005, 5, 943.
15. Wagner, R. S.; Ellis, W. C. Appl. Phys. Lett. 1964, 4, 89.
16. Nikoobakht, B.; Michaels, C. A.; Vaudin, M. D.; Stranick, S. J. Appl. Phys. Lett. 2004, 85, 3244.
17. Nikoobakht, B. Chem Mater. 2007, 19, 5279.
18. Nikoobakht, B.; Eustis, S. 2008, submitted.
19. Huang, M. H.; Mao, S.; Feick, H.; Yan, H.; Wu, Y.; Kind, H.; Weber, E.; Russo, R.; Yang, P. Science 2001, 292, 1897.
20. Yazawa, M.; Koguchi, M.; Hirutna, K. Appl. Phys. Lett. 1991, 58, 1080.
21. The protocol used for preparing sub-100 nm cross-sections is a modified form of the following reference: (a) Giannuzzi, L. A.; Kempshall, B. W.; Anderson, S. D.; Prenitzer, B. I.; Moore, T. M. F. Analysis Techniques of Submicron Defects: 2002 Supplement to the EDFAS Failure Analysis Desktop Reference; ASM International: Materials Park, OH, 2002; pp 29-35.
22. Gudiksen, M. S.; Wang, J.; Lieber, C. M. J. Phys. Chem. B 2001, 105, 4062.