Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

Journal of Crystal Growth

Volumn 262, Issue 1-4, 2004, Pages 461-466

  Tang, I Tseng ^a   Chen, Han Jan ^a   Hwang, W C ^b   Wang, Y C ^c   Houng, Mau Phon ^a   Wang, Yeong Her ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b Nanowin Technology Co   (Taiwan)

^c DEPARTMENT OF PHYSICS   (Taiwan)

Author keywords

A1. Substrate; A3. Chemical vapor deposition processes; B1. Zinc compounds; B2. Piezoelectric material; B2. Semiconducting silicon; B3. Filters

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; CHEMICAL VAPOR DEPOSITION; COATINGS; COMMUNICATION SYSTEMS; DIAMOND LIKE CARBON FILMS; FILM GROWTH; MULTILAYERS; PHOTOLITHOGRAPHY; PIEZOELECTRICITY; SEMICONDUCTING SILICON; SPUTTERING; THIN FILMS; TRANSDUCERS; ULTRAVIOLET RADIATION; ZINC OXIDE;

INTERDIGITAL TRANSDUCERS; PHASE VELOCITY; TEMPERATURE COEFFICIENT OF DELAY (TCD);

PIEZOELECTRIC MATERIALS;

EID: 0842329997     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2003.10.081     Document Type: Article

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