Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 2, 2009, Pages 352-355

  Min, Hyung Seob ^a   Yang, Min Kyu ^a   Lee, Jeon Kook ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRIC PROPERTIES; OPACITY; POLYMER FILMS; ROTATION; SEMICONDUCTING ZINC COMPOUNDS; ZINC OXIDE;

AL-DOPED ZNO; AZO FILMS; DAMAGE PROCESS; FILM SURFACES; OFF-AXIS; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMITTANCES; POLYETHERSULFONE; POLYMER SUBSTRATES; R F SPUTTERING; RADIO FREQUENCY MAGNETRON SPUTTERING; SPUTTERING METHODS; SPUTTERING PROCESS; VISIBLE RANGES;

SUBSTRATES;

EID: 61449174827     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3081966     Document Type: Article

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