Gas jet assisted vapor deposition of yttria stabilized zirconia

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 2, 2009, Pages 404-414

  Hass, D D ^a   Wadley, H N G ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND GAS; CHAMBER PRESSURES; COLUMNAR MORPHOLOGIES; COLUMNAR STRUCTURES; DIRECT SIMULATION MONTE CARLO; ELECTRON BEAM EVAPORATIONS; GAS JETS; GAS PRESSURES; HIGH PRESSURES; INCIDENCE ANGLES; INERT GAS; LATERAL SPREADING; MODERATE PRESSURES; NANOGRANULAR STRUCTURES; NANOSCOPIC PORES; PORE FRACTIONS; PORE SPACINGS; PROCESS USE; SCATTERING EVENTS; SMALL SIZES; TOTAL PORE VOLUMES; VAPOR MOLECULES; VAPOR PHASE NUCLEATIONS; VAPOR TRANSPORTS; YTTRIA-STABILIZED ZIRCONIAS;

COAL TAR; COATINGS; ELECTRON BEAMS; JETS; MONTE CARLO METHODS; TEXTURES; TITRATION; VAPORS; YTTRIA STABILIZED ZIRCONIA; YTTRIUM ALLOYS; ZIRCONIA;

INERT GASES;

EID: 61449148496     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3085725     Document Type: Article

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