Tungsten-doped tin oxide thin films prepared by pulsed plasma deposition

Materials Characterization

Volumn 60, Issue 5, 2009, Pages 415-419

  Huang, Yanwei ^a   Zhang, Qun ^a   Li, Guifeng ^a   Yang, Ming ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Pulsed plasma deposition; Thin films; Transparent conductive oxide; Tungsten doped tin oxide

Indexed keywords

CARRIER CONCENTRATION; CARRIER MOBILITY; CHEMICAL VAPOR DEPOSITION; CONDUCTIVE FILMS; DOPING (ADDITIVES); OPTICAL PROPERTIES; OXIDE FILMS; OXYGEN; PARTIAL PRESSURE; PLASMAS; POSITIVE IONS; THIN FILMS; TIN; TITANIUM COMPOUNDS; TUNGSTEN;

CERAMIC TARGETS; ELECTRICAL AND OPTICAL PROPERTIES; GLASS SUBSTRATES; OPTICAL BAND-GAP; OPTICAL TRANSMISSIONS; OXYGEN PARTIAL PRESSURES; PULSED PLASMA DEPOSITION; TIN OXIDE THIN FILMS; TRANSPARENT CONDUCTIVE OXIDE; TUNGSTEN DOPING; VISIBLE REGIONS;

PLASMA DEPOSITION;

EID: 61349184360     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2008.11.005     Document Type: Article

References (22)

1. Lee J. Effects of oxygen concentration on the properties of sputtered SnO2:Sb films deposited at low temperature. Thin Solid Films 516 (2008) 1386-1390
2. Exarhos G.J., and Zhou X.D. Discovery-based design of transparent conducting oxide films. Thin Solid Films 515 (2007) 7025-7052
3. Minami T. Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications. Thin Solid Films 516 (2008) 1314-1321
4. Granqvist C.G. Transparent conductors as solar energy materials: a panoramic review. Sol Energy Mater Cells 91 (2007) 1529-1598
5. Batzill M., and Diebold U. The surface and materials science of tin oxide. Prog Surf Sci 79 (2005) 47-154
6. Kurz A., Brakecha K., and Puetz J. Strategies for novel transparent conducting sol-gel oxide coatings. Thin Solid Films 502 (2006) 212-218
7. 3:Mo. Thin Solid Films 394 (2001) 219-223
8. Zhang D., Tao L., Deng Z., Zhang J., and Chen L. Surface morphologies and properties of pure and antimony-doped tin oxide films derived by sol-gel dip-coating processing. Mater Chem Phys 100 2-3 (2006) 275-280
9. Martel A., Caballero-Briones F., Quintana P., Bartolo-Pérez P., and Peña J.L. X-ray study of tin oxide films obtained by reactive DC sputtering from a metallic tin target in pure oxygen plasma. Surf Coat Technol 201 8 (2007) 4659-4665
10. Wang S., Huang J., Zhao Y., Wang S., Wu S., Zhang S., et al. Nanostructure SnO2 and supported Au catalysts: synthesis, characterization, and catalytic oxidation of Co. Mater Lett 60 (2006) 1706-1709
11. 3 (0001) by MOCVD. Mater Lett 62 (2008) 1779-1781
12. Ryu Y.R., Zhu S., Wrobel J.M., Jeong H.M., Miceli P.F., and White H.W. Comparative study of textured and epitaxial ZnO films. J Cryst Growth 216 (2000) 326-329
13. 3:Mo thin films deposited by Channel Spark Ablation. J Vac Sci Technol A 23 5 (2005) 350-1353
14. 3 (0001) by MOCVD. Mater Lett 62 (2008) 1809-1811
15. Kim I.H., Ko J.H., Kim D., Lee K.S., Jeong J.H., Cheong B., et al. Scattering mechanism of transparent conducting tin oxide films prepared by magnetron sputtering. Thin Solid Films 515 (2006) 2475-2480
16. Ji Z., Zhao L., He Z., Zhou Q., and Chen C. Transparent p-type conducting indium-doped SnO2 thin films deposited by spray pyrolysis. Mater Lett 60 (2006) 1387-1389
17. Ma Q.-B., Ye Z.-Z., He H.-P., Hu S.-H., Wang J.-R., Zhu L.-P., et al. Structural, electrical, and optical properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering. J Cryst Growth 304 (2007) 64-68
18. 2: Sb thin films by ultrasonic spray pyrolysis. Thin Solid Films 510 (2006) 154-158
19. Freeman A.J., Poeppelmeier K.R., Mason T.O., Chang R.P.H., and Marks T.J. Chemical and thin film strategies for new transparent conducting oxides. MRS Bull 25 (2000) 45-51
20. Gupta R.K., Ghosh K., Mishra S.R., and Kahol P.K. High mobility W-doped In2O3 thin films: effect of growth temperature and oxygen pressure on structural, electrical and optical properties. Appl Surf Sci 254 (2008) 1661-1665
21. Wooten F. Optical Properties of Solids (1972), Academic Press Inc. 45
22. 3 films: Basic optical properties and applications to energy-efficient windows. J Appl Phys 60 (1986) R123-R159