Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching

Applied Surface Science

Volumn 255, Issue 10, 2009, Pages 5641-5646

  Gottmann, Jens ^a   Wortmann, Dirk ^a   Hörstmann Jungemann, Maren ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Femtosecond laser radiation; Hollow nanoplanes; In volume laser induced selective etching; Sub wavelength ripples

Indexed keywords

ASPECT RATIO; ETCHING; FEMTOSECOND LASERS; SAPPHIRE;

HIGH ASPECT RATIO; HOLLOW NANOPLANES; LASER ETCHING; LASER INDUCED; SELECTIVE ETCHING; SUB-WAVELENGTH; SURFACE RIPPLES; VOLUME NANOSTRUCTURES;

FUSED SILICA;

EID: 61349091659     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.10.097     Document Type: Article

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