Patterned growth of carbon nanotubes through AFM nano-oxidation

Diamond and Related Materials

Volumn 18, Issue 2-3, 2009, Pages 355-359

  Chiu, Chien Chao ^a   Yoshimura, Masamichi ^a   Ueda, Kazuyuki ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

AFM; CNT; CVD; Nano oxidation; Selective growth; Silicide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CATALYSIS; CHEMICAL VAPOR DEPOSITION; GROWTH (MATERIALS); IRON OXIDES; NANOCOMPOSITES; NANOTUBES; OXIDATION; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SILICIDES; SILICON; SILICON COMPOUNDS; VAN DER WAALS FORCES;

AFM; CNT; CVD; NANO-OXIDATION; SELECTIVE GROWTH; SILICIDE;

CARBON NANOTUBES;

EID: 59649110473     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.09.010     Document Type: Article

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