Synthesis of carbon nanotubes by microwave plasma-enhanced hot filament chemical vapor deposition

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 611-614

  Chiu, Chien Chao ^a   Yoshimura, Masamichi ^a   Ueda, Kazuyuki ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

CNT; CVD; Hot filament; Plasma

Indexed keywords

METHANE; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SYNTHESIS (CHEMICAL);

DIAMETER DISTRIBUTION; MICROWAVE PLASMA; SOURCE GAS;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 42949108789     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.08.031     Document Type: Article

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